OHT (Overhead Hoist Transport): The "arteries" of the fab. In 2026, OHT systems (like those from Daifuku and Muratec) use AI-driven path planning to move FOUPs (Front Opening Unified Pods) across the ceiling at high speeds, minimizing "traffic jams" in 300mm fabs.
AMR (Autonomous Mobile Robots): Unlike older AGVs that follow fixed tracks, 2026 AMRs use LiDAR and SLAM (Simultaneous Localization and Mapping) to navigate the fab floor. They are primarily used for "last-mile" delivery of chemicals, reticles, and maintenance tools.
Atmospheric & Vacuum Robots: These are the specialized arms (e.g., from Brooks Automation or Rorze) that sit inside the processing tools. They must move wafers with sub-millimeter precision in a vacuum or nitrogen environment without generating a single particle of dust.